CsI High Vacuum Deposition System is exclusively designed for CsI metallization on scintillation screens in an extremely high vacuum environment.
The CsI scintillators 200～600µm in thickness ranges with high uniformity of thickness and brightness performance.
Cesium Iodide (CsI ) Deposition characterizations:
Ultra- High Spatial Resolution of Imaging;
Fast response for sharper imaging;
Class leading edge-to-edge image areas;
Optical absorb layers or reflector layers;
Low patient X-ray dose;
Application: for security check and inspection, high energy physics education, nuclear radiaton detection and medical imagings: chest examination, mamography, dental inter oral and panoramic.
Substrates Applied: TFT glass, Fiber Optic Plate, Amorphous-carbon plate, Aluminum plate
Equipment Features:
Reliability:
24/7 days non-stop operation;
Inficon Film Thickness Controller to monitor the film thickness inline.
Temperature control accuracy: ±1 ℃, multi-stage setting, automatic temperature data recording and control
Rotary racks equipped with Servo-Motor for high accuracy and stability.
Safety:
High vacuum pump: Magnetic Suspension Molecular Pump, with nitrogen gas blowing device to avoid hazard material be exposed in the air;
All electrodes are equipped with safety protection sleeves.
Repeatability & Reproducibility:
Through high precised parameter control system,
Automated process control software and program,
User friendly operation.
Efficiency:
CsI-950A+ model is with 2-rotary rack structure based on Generation -one CsI-950 model.
Double-capacity for max. size substrate: 500 x400mm.
Technical Specifications
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Description
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RT-CsI950
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RTEP800
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Deposition chamber (mm)
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φ950 x H1350
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φ800 x H800
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Capacity
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2
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1
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Evaporation sources
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2
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4
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Dry and Dehumidity
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Iodine tungsten lamp
Max. 300℃
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Iodine tungsten lamp
Max. 200℃
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Ultimated vacuum pressure (Pa)
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8.0×10-5Pa
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5.0×10-4Pa
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Deposition Film Thickness Controller
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Quartz Control x 1
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NONE
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Power Consumption (KW)
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Max. approx. 50
Average approx. 20
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Max. approx. 20
Average approx. 10
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Footprint (L*W*H)
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3000*2150*2100mm
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1800*2300*2100mm
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Operation & Control System
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CE standard
Mitsubishi PLC+ Touch Screen
Operation Program with backup
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In addition to the RT-CsI950 equipment, we also provide its post-processing machines which to generate protective layer on the top of CsI film.
-- RTEP800, which is using the thermal evaporation coating technology. Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.
Product Tags:
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CsI High Vacuum Deposition System -RT-CsI950 Images
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